Study on structure-performance relationship of complex agent in CMP of 6063 aluminum alloy
6063 aluminum alloy has a wide range of applications in many industries because of its unique properties.Chemi-cal mechanical polishing(CMP)is an ultra-precision machining technology that can achieve the global flattening of the plane and obtain an ultra-smooth mirror effect.In order to improve the polishing efficiency of 6063 aluminum alloy,the ef-fects of different group(amino and carboxyl)complexing agents on the polishing rate and surface roughness of aluminum al-loy and their mechanism were studied,and the influence mechanism of different group complexing agents on CMP process-ing of 6063 aluminum alloy was analyzed by electrochemical workstation and X-ray photoelectron spectroscopy(XPS).It was found that the improvement of the polishing performance of 6063 aluminum alloy by carboxylic acid complexing agent was greater than that of amines and amino acids in the polishing slurry system containing hydrogen peroxide,and the re-moval rate and surface quality were improved with the longer carbon chain of carboxylic acid and amine complexing agent.Amino acid complexing agents exhibited different rules from carboxylic acid and amine complexing agents,and the material removal rate was decreased with the growth of carbon chains.XPS and electrochemical analysis showed that the addition of two different group complexants would form an adsorption layer on the surface of the aluminum alloy and protect the surface of the aluminum alloy.Carboxylic acids and amine complexants with long carbon chains contributed to the corrosion dissolu-tion of aluminum alloy surfaces,thereby increasing the polishing rate.
chemical mechanical polishing6063 aluminum alloypolishing ratecomplexing agentstructure-performance relationship
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