Analysis on internal gas hole defects in large size molybdenum target
At present,there is high demand for large size molybdenum targets in panel display industry.In the actual pro-duction process of molybdenum targets,some gas hole defects usually exist inside due to the large size of the target(the length of the wide target is up to 2 300 mm).In order to investigate the formation causes of internal gas holes in molybde-num targets,the samples were taken from the defective target materials after water immersion.The block samples were characterized by microscopic morphology,chemical composition,and energy spectrum analysis.The results showed that the gas hole defects with different morphologies in molybdenum targets were mainly manifested as large and small sized pores,banded defects,and small sized pores.The reasons for the formation of pores were related to the specific impurities in the target,sintering process system,or furnace conditions.The process improvement measures to solve the formation of gas hole defects were proposed,which had been proven to be effective through batch production.
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