Near-field scanning microwave microscopy(NSMM)has emerged as a crucial tool for characterizing electromagnetic properties at the micro and nanoscale for its strong penetration capabili-ty and non-destructive detection.This article firstly introduced structural principle of NSMM,probe simulation optimization,and methods for correcting image tilt.Then,the article elaborated on the measurement of local high-frequency electrical conductivity and permittivity of samples.Finally,the application of NSMM in the fields of materials and biology was discussed especially,and the obtained point scan,line scan and plane scan were analyzed in detail.This article aimed to enhance readers'un-derstanding of the current status and future prospects of NSMM.
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