物理学报2024,Vol.73Issue(7) :292-299.DOI:10.7498/aps.73.20231677

超晶格插入层对InGaN/GaN多量子阱的应变调制作用

Strain modulation effect of superlattice interlayer on InGaN/GaN multiple quantum well

曹文彧 张雅婷 魏彦锋 朱丽娟 徐可 颜家圣 周书星 胡晓东
物理学报2024,Vol.73Issue(7) :292-299.DOI:10.7498/aps.73.20231677

超晶格插入层对InGaN/GaN多量子阱的应变调制作用

Strain modulation effect of superlattice interlayer on InGaN/GaN multiple quantum well

曹文彧 1张雅婷 1魏彦锋 1朱丽娟 1徐可 1颜家圣 2周书星 3胡晓东4
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作者信息

  • 1. 湖北文理学院物理与电子工程学院,低维光电材料与器件湖北省重点实验室,襄阳 441053
  • 2. 湖北台基半导体股份有限公司,大功率半导体技术湖北省重点实验室,襄阳 441021
  • 3. 湖北文理学院物理与电子工程学院,低维光电材料与器件湖北省重点实验室,襄阳 441053;武汉大学,电子制造与封装集成湖北省重点实验室,武汉 430072
  • 4. 北京大学物理学院,人工微结构和介观物理国家重点实验室,北京 100871
  • 折叠

摘要

在InGaN/GaN异质结构量子阱内存在巨大的压电极化场,这严重地削弱了量子阱的发光效率.为了减弱量子阱内的压电极化场,通常引入应变调制插入层提升器件的发光性能.为了研究InGaN/GaN超晶格的应变调制效果和机理,实验设计制备了具有n型InGaN/GaN超晶格插入层的外延结构及其对照样品.变温光致发光谱测试表明引入n型InGaN/GaN超晶格插入层的样品发光波长更短且内量子效率提升,相应的电致发光谱积分强度也显著增加且半宽减小,说明引入超晶格应变插入层可以在一定程度上抑制影响发光效率的量子限制Stark效应.理论计算结果表明:在生长有源区量子阱前引入超晶格应变层,可以削弱有源区量子阱内极化内建电场,减弱有源区量子阱能带倾斜,增加电子空穴波函数交叠,提高发射几率,缩短辐射复合寿命,有利于辐射复合与非辐射复合的竞争,实现更高的复合效率,从而提高发光强度.本文从实验和理论两方面验证了超晶格应变调制插入层可以有效改善器件性能,为器件的结构设计优化指明方向.

Abstract

The strong piezoelectric field in InGaN/GaN heterostructure quantum wells severely reduces the light emission efficiency of multiple quantum well(MQW)structures.To address this issue,a strain modulation interlayer is commonly used to mitigate the piezoelectric polarization field and improve the luminescence performance of the devices.To investigate the influence and mechanism of strain modulation in the InGaN/GaN superlattice(SL),epitaxial wafers with an n-type InGaN/GaN SL interlayer sample,and their corresponding control samples are prepared.The measured temperature-dependent photoluminescence(PL)spectra of the epitaxial wafers,show that the introduction of an SL interlayer leads to a shorter-wavelength emission and enhancement of internal quantum efficiency.As the temperature increases,a blue shift of the PL peak is observed.However,for the sample with an SL interlayer,the blue shift of the PL peak with temperature increasing is relatively small.Electroluminescence(EL)experiments indicate that the introduction of an SL interlayer significantly increases the integrated intensity of the EL peak and reduces its full width at half maximum.These phenomena collectively indicate that the incorporation of a superlattice interlayer can partly suppress the quantum-confined Stark effect(QCSE)that affects the light emission efficiency.Theoretical calculations show that the introduction of a superlattice strain layer before growing an active multiple quantum well can weaken the polarization-induced built-in electric field in the active quantum well,reduce the tilt of the energy band in the multiple quantum well active region,increase the overlap of electron and hole wave functions,enhance the emission probability,shorten the radiative recombination lifetime,and promote competition between radiative recombination and non-radiative recombination,thereby achieving higher recombination efficiency and improving light emission intensity.This study provides experimental and theoretical evidence that the strain modulation SL interlayer can effectively improve the device performance and offer guidance for optimizing the structural design of devices.

关键词

GaN/多量子阱/超晶格/应变调制

Key words

GaN/multiple quantum well/superlattice/strain modulation

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基金项目

湖北省教育厅科研项目(Q20222607)

襄阳市基础研究科技计划(2022ABH006045)

电子制造与封装集成湖北省重点实验室(武汉大学)开放基金(EMPI2023009)

湖北文理学院教学研究项目(JY2023017)

湖北文理学院博士科研启动基金(2020170367)

出版年

2024
物理学报
中国物理学会,中国科学院物理研究所

物理学报

CSTPCDCSCD北大核心
影响因子:1.038
ISSN:1000-3290
参考文献量26
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