偏振调制扫描光学显微镜方法
Polarization modulation scanning optical microscopy method
张洋 1张志豪 1王宇剑 1薛晓兰 1陈令修 1石礼伟1
作者信息
- 1. 中国矿业大学材料与物理学院,徐州 221116
- 折叠
摘要
基于反射差分谱原理搭建了适用于二维材料和微纳器件的偏振调制扫描光学显微镜系统,可以实现对于材料或者器件的微米级区域进行反射差分显微成像的研究.通过研究两种典型的二维层状材料MoS2 和ReSe2 的反射差分显微成像,发现相比于传统的反射显微镜,我们搭建的偏振调制扫描光学显微镜对于二维材料的层数特征更敏感,且可以用来表征二维材料的平面光学各向异性.相关研究有助于更进一步理解层状二维材料的层数特征和各向异性性质.
Abstract
Since the discovery of monolayer graphene,the novel physical properties of two-dimensional(2D)materials,particularly those with fewer layers that often exhibit unique properties different from bulk materials,have received significant attention.Therefore,accurately determining the layer number or obtaining the microscopic surface morphology is crucial in the laboratory fabrication and during device manufacturing.However,traditional detection methods have numerous drawbacks.There is an urgent need for a convenient,accurate,and non-destructive scientific method to characterize the layer number and surface microstructure of 2D materials.By combining the experimental setup of laser scanning photocurrent spectroscopy,we develop a polarization-modulated scanning optical microscope based on the principle of reflectance difference spectroscopy.By monitoring the reflectivity of the samples,we can observe changes in the reflection signal strength of MoS2 with different layer numbers.The intensity of the reflectance differential spectral signal reflects changes in the layer count within the sample.We can characterize the changes in the number of layers of 2D materials in a non-contact manner by using polarization-modulated scanning optical microscopy.Through the study of the reflectance differential spectra of two typical 2D layered materials,MoS2 and ReSe2,we find that our polarization-modulated scanning optical microscope system is also more sensitive to the characteristics of the stacking anisotropy of the 2D materials than the conventional reflection microscope.This indicates that our research contributes to a better understanding of the layer number characteristics and anisotropic properties of layered 2D materials.Furthermore,our research also provides a non-contact optical method to characterize the number of layers and optical anisotropy of two-dimensional layered material.
关键词
反射各向异性光谱/显微成像/光学各向异性/二维材料Key words
reflectance anisotropy spectroscopy/microscopic imaging/optical anisotropy/two-dimensional materials引用本文复制引用
基金项目
国家自然科学基金专项基金(62341406)
江苏省基础研究计划(自然科学基金)-青年基金(BK20221113)
徐州市科技项目-基础研究计划(KC23004)
出版年
2024
国家科技期刊平台
NSTL
万方数据