Research Progress of UV-Activated Metal Oxide Gas Sensors
In recent years,with the increasingly serious environmental pollution problems,the requirements for sensors are also increasing.Although the traditional metal oxide gas sensor has good response,its development is restricted by high operating temperature and poor selectivity.The combination of ultraviolet(UV)activation,morphology control,metal doping and heterojunction construction is considered to be an effective way to solve this problem.The research progress of UV-activated metal oxide gas sensors in recent years is reviewed,and the working mechanism of UV-activated metal oxide gas sensors is investigated in detail.The research progresses of semiconductor gas sensors,gas-sensitive structures,device design and device integration using ZnO,TiO2,SnO2 and In2O3 as sensitive materials under ultraviolet activation are reviewed.Finally,some possible challenges and problems in the practical application of UV-activated metal oxide gas sensors are pointed out.
gas sensorlight activationultraviolet lightmetal oxide semiconductorgas-sensitive property
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维普
