Haze detection is important for environmental governance.However,the haze detection sensor has the problem that it cannot operate after particles are attached.An ultrasonic cleaning technology based on the principle of acoustic agglomeration was proposed to solve this problem.The commonly used mechanical dust removal method has no significant effect on the removal of micron particles,the wet dust removal method will increase the risk of equipment corrosion,and the electrostatic dust removal method has disadvantages such as high power supply voltage and large power consumption.Compared with the above dust removal method,this technology has the characteristics of non-contact and non-damage,and is suitable for sensor cleaning.The adhesion force between the electrode plates and particles and the frequency and power of the ultrasonic generator were calculated.The range of acoustic wave conduction,the structure and position of fixed backplane of ultrasonic transducer were determined by simulation.By analyzing the conduction state of ultrasonic wave in space,the propagation frequency and sound pressure of ultrasonic wave were optimized,and the variation range of sound intensity was determined.The experimental results show that the mass of the sensor is reduced after cleaning and the difference between the minimum current and the initial current is only 1.9％,and the dust removal efficiency is as high as 98％,which is better than the commonly used gas flow sensor dust removal device based on the cyclone principle,indicating the high efficiency of ultrasonic cleaning technology.
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