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一种小体积MEMS传感器数据记录仪

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对飞行器发射航行阶段的数据测试是目前研究的重要方向.数据记录仪作为一种可装载的数据采集装置,具有重要的研究价值.针对小型飞行器的数据采集工作,提出了一种具有小体积、低功耗、高性能以及高抗过载能力的微电子机械系统(MEMS)传感器数据记录仪.它能够对三轴角速度、加速度以及磁场数据进行同步测量.数据计算和实验测试结果表明,记录仪总体积为22.4 cm3,工作状态下的功耗仅为0.68 W.通过抗过载工艺使系统抗过载能力达到了 18 000g,实现了对于小体积、低功耗和高抗过载能力的特性要求.通过Labview软件对磁场数据进行测量及误差分析,得到线性度误差最大值仅为-1.14%,满足HMC1053三轴磁传感器线性度误差优于士 1.8%的指标要求,能够实现对于小型飞行器发射航行过程中的数据采集,具有很高的可行性.
A Small Volume MEMS Sensor Data Recorder
The data test of aircraft launching and flight stage is an important research direction at present.As a loadable data acquisition device,the data recorder has important research value.Aiming at the data acquisition of small aircraft,a microelectronic mechanical system(MEMS)sensor data recorder with small volume,low power consumption,high performance and high anti-overload ability was proposed.It can measure the data of triaxial angular velocity,acceleration and magnetic field synchronously.Data calculation and experimental test results show that the total volume of the recorder is 22.4 cm3,and the power consumption in the working state is only 0.68 W.Through the anti-overload process,the anti-overload capability of the system reaches 18 000g,which realizes the characteristic requirements for small volume,low power consumption and high anti-overload capability.Labview software was used to measure the magnetic field data and analyze the error.The obtained maximum linearity error is only-1.14%,which meets the index requirement that the linearity error of HMC1053 triaxial magnetic sensor is better than±1.8%,and can realize the data acquisition during the launching and flight of small aircraft and has high feasibility.

sensor data recordermicroelectronic mechanical system(MEMS)small volumehigh anti-overloadlow power consumption

尚义航、赵凯明、段俊萍、张斌珍

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中北大学仪器与电子学院,太原 030051

b.中北大学仪器科学与动态测试教育部重点实验室,太原 030051

传感器数据记录仪 微电子机械系统(MEMS) 小体积 高抗过载 低功耗

2025

微纳电子技术
中国电子科技集团公司第十三研究所

微纳电子技术

影响因子:0.283
ISSN:1671-4776
年,卷(期):2025.62(1)