首页|晶圆微凸点技术在先进封装中的应用研究进展

晶圆微凸点技术在先进封装中的应用研究进展

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先进封装技术持续朝着连接密集化、堆叠多样化和功能系统化的方向发展,探索了扇出型封装、2.5D/3D封装、系统级封装等多种封装工艺.晶圆微凸点技术已被广泛应用于各种先进封装工艺中,是最重要的基础技术之一.本文介绍了微凸点制备的主要技术并进行优劣势比较,同时详述了锡球凸点和铜柱凸点两种不同的微凸点结构,为微凸点技术的更深入研究提供参考.最后,本文整理了微凸点技术在先进封装中的应用,并展望了未来的发展趋势.
Research progress on applications of wafer micro-bump technology in advanced packaging
Advanced packaging technologies are getting more and more connection-dense,stacking-diversified,and functionally systematized.A variety of packaging processes have been developed,such as fan-out,2.5D/3D,and system-in-package.Wafer micro-bumps one of the most important technologies,has been widely used in various advanced packaging processes.In this paper,the main techniques of micro-bump preparation are introduced,and the advantages and disadvantages are compared.At the same time,two different micro-bump structures,namely,tin ball bump and copper pillar bump,are discussed to provide a reference for more in-depth research on micro-bumps.Finally,the applications of micro-bumps in advanced packaging are summarized in this paper,and the tendency of development in the near future is predicated.

advanced packagingmicro-bumpspreparation techniquesbump structures

刘冰、夏良、贺京峰、孔云、陈平

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贵州振华风光半导体股份有限公司 贵阳 550018

先进封装 微凸点 制备技术 凸点结构

2024

微纳电子与智能制造

微纳电子与智能制造

ISSN:
年,卷(期):2024.6(1)
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