首页|第三代半导体材料氮化镓的拉曼光谱分析

第三代半导体材料氮化镓的拉曼光谱分析

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第三代半导体材料中氮化镓是高频电子器件、大功率电子器件和微波功率器件制造领域的首选材料.为了实现高质量氮化镓材料的外延生长,并且精准表征氮化镓外延材料的特性,文章对氮化镓外延材料进行了深入的拉曼光谱分析.实验结果表明,对氮化镓外延材料进行拉曼光谱分析时最佳扫描范围是100~1 000 cm-1、最佳曝光时间是5 s、最佳光孔直径为100 μm,从而更精准地表征氮化镓外延材料,进而对微波功率器件的性能提升起到推动作用.
Raman spectroscopic analysis of the third generation semiconductor material Gallium Nitride
Gallium Nitride has become the preferred material in the manufacturing of high-frequency electronic devices,high-power electronic devices and microwave power devices in the third generation semiconductor materials.How to achieve epitaxy growth of high quality Gallium Nitride materials and accurately characterize the characteristics of Gallium Nitride epitaxy materials requires in-depth Raman spectroscopic analysis of Gallium Nitride epitaxy materials.The experimental results show that the best scanning range is 100~1 000 cm-1,the best exposure time is 5 seconds,and the best optical hole diameter is 100 μm,so as to more accurately characterize Gallium Nitride epitaxial materials,and thus promote the performance of microwave power devices.

third generation semiconductor materialsGallium NitrideRaman spectroscopy

王亚伟

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中国电子科技集团公司第十三研究所,河北 石家庄 050051

第三代半导体材料 氮化镓 拉曼光谱

国家重点研发计划

2022YFB3404304

2024

无线互联科技
江苏省科学技术情报研究所

无线互联科技

影响因子:0.263
ISSN:1672-6944
年,卷(期):2024.21(3)
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