首页|脉冲频率对高脉冲磁控溅射Cr/C镀层组织结构和耐蚀性的影响

脉冲频率对高脉冲磁控溅射Cr/C镀层组织结构和耐蚀性的影响

Effect of Pulse Frequency on the Microstructure and Corrosion Resistance of High Pulse Magnetron sputtering Cr/C coatings

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为研究磁控溅射脉冲频率对镀层组织结构和耐蚀性的影响,以200、300、400、500和600 Hz脉冲频率下制备的Cr/C镀层为对象,采用XRD、SEM、电化学工作站对其相组成、微观组织和耐蚀性进行了表征分析.结果表明:不同脉冲频率下制备的Cr/C镀层相组成相同,均为Cr7C3;Cr/C镀层的表面形貌均为菜花状颗粒,截面组织均为柱状晶;随着脉冲频率的增加,Cr/C镀层的组织变粗,柱状晶之间的空隙增大,致密性降低,表面粗糙度增加,镀层的厚度增大,镀层的平均沉积速率从18.45 nm·min-1增大到28.08 nm·min-1;脉冲频率为500 Hz时镀层的腐蚀电位最高、腐蚀电流最低,腐蚀速率仅为0.002 96 mm·a-1.
In order to study the effect of magnetron sputtering pulse frequency on the microstruc-ture and corrosion resistance of Cr/C coatings prepared at 200,300,400,500 and 600 Hz,the phase composition,microstructure and corrosion resistance are analyzed by XRD,SEM and elec-trochemical workstation.The results show that the phase composition of Cr/C coatings prepared under different pulse frequencies is the same,all of which are Cr7C3.The surface morphology of Cr/C coatings is cauliflower particles,and the cross-section structure is columnar crystal.With the increase of pulse frequency,the microstructure of Cr/C coating becomes coarser,the gaps between the columnar crystals increases,the densification decreases,the surface roughness increa-ses,the thickness of the coating increases,and the average deposition rate of the coating increases from 18.45 nm·min-1to 28.08 nm·min-1.When the pulse frequency is 500 Hz,the corrosion potential of the coating is the highest,the corrosion current is the lowest,and the corrosion rate is only 0.002 96 mm·a-1.

pulse magnetron sputteringpulse frequencyCr/C coatingmicrostructurecorrosion resistance

鲁媛媛、吴坤尧、罗发、杨超群、刘伟锋、曹悦悦

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西安航空学院材料工程学院,西安 710077

西北工业大学材料学院,西安 710072

脉冲磁控溅射 脉冲频率 Cr/C镀层 组织结构 耐蚀性

国家科技重大专项西安航空学院科研基金

J2019-Ⅵ-0015-01302023KY1201

2024

西安航空学院学报
西安航空技术高等专科学校

西安航空学院学报

影响因子:0.351
ISSN:1008-9233
年,卷(期):2024.42(3)
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