西安航空学院学报2024,Vol.42Issue(3) :44-49.DOI:10.20096/j.xhxb.1008-9233.2024.03.007

脉冲频率对高脉冲磁控溅射Cr/C镀层组织结构和耐蚀性的影响

Effect of Pulse Frequency on the Microstructure and Corrosion Resistance of High Pulse Magnetron sputtering Cr/C coatings

鲁媛媛 吴坤尧 罗发 杨超群 刘伟锋 曹悦悦
西安航空学院学报2024,Vol.42Issue(3) :44-49.DOI:10.20096/j.xhxb.1008-9233.2024.03.007

脉冲频率对高脉冲磁控溅射Cr/C镀层组织结构和耐蚀性的影响

Effect of Pulse Frequency on the Microstructure and Corrosion Resistance of High Pulse Magnetron sputtering Cr/C coatings

鲁媛媛 1吴坤尧 1罗发 2杨超群 1刘伟锋 1曹悦悦1
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作者信息

  • 1. 西安航空学院材料工程学院,西安 710077
  • 2. 西北工业大学材料学院,西安 710072
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摘要

为研究磁控溅射脉冲频率对镀层组织结构和耐蚀性的影响,以200、300、400、500和600 Hz脉冲频率下制备的Cr/C镀层为对象,采用XRD、SEM、电化学工作站对其相组成、微观组织和耐蚀性进行了表征分析.结果表明:不同脉冲频率下制备的Cr/C镀层相组成相同,均为Cr7C3;Cr/C镀层的表面形貌均为菜花状颗粒,截面组织均为柱状晶;随着脉冲频率的增加,Cr/C镀层的组织变粗,柱状晶之间的空隙增大,致密性降低,表面粗糙度增加,镀层的厚度增大,镀层的平均沉积速率从18.45 nm·min-1增大到28.08 nm·min-1;脉冲频率为500 Hz时镀层的腐蚀电位最高、腐蚀电流最低,腐蚀速率仅为0.002 96 mm·a-1.

Abstract

In order to study the effect of magnetron sputtering pulse frequency on the microstruc-ture and corrosion resistance of Cr/C coatings prepared at 200,300,400,500 and 600 Hz,the phase composition,microstructure and corrosion resistance are analyzed by XRD,SEM and elec-trochemical workstation.The results show that the phase composition of Cr/C coatings prepared under different pulse frequencies is the same,all of which are Cr7C3.The surface morphology of Cr/C coatings is cauliflower particles,and the cross-section structure is columnar crystal.With the increase of pulse frequency,the microstructure of Cr/C coating becomes coarser,the gaps between the columnar crystals increases,the densification decreases,the surface roughness increa-ses,the thickness of the coating increases,and the average deposition rate of the coating increases from 18.45 nm·min-1to 28.08 nm·min-1.When the pulse frequency is 500 Hz,the corrosion potential of the coating is the highest,the corrosion current is the lowest,and the corrosion rate is only 0.002 96 mm·a-1.

关键词

脉冲磁控溅射/脉冲频率/Cr/C镀层/组织结构/耐蚀性

Key words

pulse magnetron sputtering/pulse frequency/Cr/C coating/microstructure/corrosion resistance

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基金项目

国家科技重大专项(J2019-Ⅵ-0015-0130)

西安航空学院科研基金(2023KY1201)

出版年

2024
西安航空学院学报
西安航空技术高等专科学校

西安航空学院学报

影响因子:0.351
ISSN:1008-9233
参考文献量4
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