真空热处理对不锈钢表面TiN薄膜结构及性能的影响
Effect of vacuum heat treatment on structure and properties of TiN thin film deposited stainless steel surface
卢琳琳 1刘晨曦 1曹航玮 1徐洁 1刘禹松 1范重庆1
作者信息
- 1. 西安工程大学 材料工程学院,陕西 西安 710048
- 折叠
摘要
为提高不锈钢材料在海洋环境中的耐腐蚀能力,采用磁控溅射技术在304不锈钢表面沉积TiN薄膜,并在不同温度下对其进行真空热处理,研究热处理温度对TiN薄膜结构及性能的影响.结果表明:适当的真空热处理可提高304不锈钢表面TiN薄膜的结晶度及致密性,缓解其残余应力.与未处理薄膜相比,500℃真空热处理后薄膜内部应力可降低87%,与基底的结合强度提高78%,其腐蚀电流密度由2.42×10-6 A/cm2 降低到4.43×10-7 A/cm2,腐蚀电位由-0.247 V提高到-0.044 V,耐腐蚀性能明显提升.
Abstract
In order to improve the corrosion resistance of stainless steel materials in the marine environ-ment,TiN thin films were deposited on the surface of 304 stainless steel by magnetron sputtering tech-nique and vacuum heat-treated at different temperatures,and the effects of the heat-treatment tempera-ture on the structure and properties of the films were investigated.The results show that proper vacuum heat treatment can improve the crystallinity and densification of TiN film on the surface of 304 stainless steel and relieve its residual stress.Compared with the untreated film,the internal stress of the film can be reduced by 87%after the vacuum heat treatment at 500℃,the adhesive strength with the substrate increases by 78%,its corrosion current density is reduced from 2.42×10-6 A/cm2 to 4.43×10-7 A/cm2,and the corrosion potential increases from-0.247 V to-0.044 V,which improves the corrosion resistance significantly.
关键词
真空热处理/TiN薄膜/不锈钢/残余应力/结合强度/耐腐蚀性Key words
vacuum heat treatment/TiN thin film/stainless steel/residual stress/adhesive strength/corrosion resistance引用本文复制引用
基金项目
陕西省自然科学基础研究计划(2023-JC-YB-471)
陕西省自然科学基础研究计划(2023-JC-YB-476)
出版年
2024
国家科技期刊平台
NSTL
万方数据