The research status of modified Siemens polysilicon production process as well as tail gas recovery is reviewed.Three kinds of tail gas recovery processes,including wet recovery,membrane separation recovery and dry recovery,are elaborated from the aspects of recovery rate,recovery effect and energy consumption.The research progress on each unit of polysilicon tail gas dry recovery process is summarized in detail,and the future research directions are predicted according to the current situation.
polysilicontail gas recoverychlorosilanemembrane separation
维普
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