Application of multifunctional composite magnetron sputtering platform
Magnetron sputtering has the advantages of low deposition temperature,and dense and sturdy thin films,and is widely used to prepare functional films.However,it has the defects such as insufficient ionization rate,low deposition rate,and single function,making it difficult to meet the strict technical requirements of special functional films.To solve the above problems,a composite sputtering platform is designed,which has front and rear doors,can install multiple sputtering cathodes and ion sources,and has planetary workpiece turntables that can be connected to high-voltage pulse bias voltage.The vacu-um coating chamber,water cooling system,multi-station workpiece turntables with overall insulation,and vacuum gas circuit system are optimized.The feasibility of this design is verified through theoretical calculations and finite element analysis.
physical vapor depositionmagnetron sputtering platformsputtering cathodevacuum gas circuit system
NETL
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