二氧化铪是一种重要的无机化合物，在耐火材料、陶瓷材料、核工业、催化剂等方面都发挥着重要的作用。作为微电子领域最具应用前景的材料之一，二氧化铪中杂质元素对其性质、质量可靠性及应用有着十分关键的影响。在水浴的条件下，利用硝酸和氢氟酸溶解样品。选择 Fe 239。562nm、P 178。284nm 作为分析谱线，采用基体匹配消除基体效应的影响，建立了ICP-AES法测定二氧化铪中杂质元素铁、磷的方法。在线性范围内，各元素校准曲线的线性关系良好;方法的检出限为 0。0039μg/ml-0。0057μg/ml;结果的相对标准偏差≤7。14%;加标回收率为97。2%～115。0%。
Determination of iron and phosphorus in hafnium dioxide by ICP-AES
Hafnium dioxide is an important inorganic compound,which plays a major role in refractory materials,ceramic materials,nuclear industry,catalysts and so on.As one of the most promising materials in the field of microelectronics,the impurity elements in hafnium dioxide have a very critical impact on its properties,quality reliability and application.In water bath,the sample is dissolved with nitric acid and hydrofluoric acid.A new method for the determination of impurity elements Fe and P in hafnium dioxide by ICP-AES was established.Fe 239.562nm and P 178.284nm were selected as analytical spectral lines,matrix matching was used to eliminate the influence of matrix effect.In the linear range,the correlation coefficient of each element calibration curve is good.The detection limit of the method was 0.0039μg/ml-0.0057μg/ml.The relative standard deviation of the results is less than 7.14% .The recoveries were 97.2%～115.0% .
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