首页|Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system
Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system
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In this study,a new method was developed to realize two-dimensional(2D)figure correction of grazing-incidence X-ray mirrors using a one-dimensional(1D)ion-beam figuring system.A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area.Accord-ingly,a long mirror could be manufactured.Using this method,the surface height root-mean-square(RMS)error of the center area of 484 mm ×16 mm was reduced from 11.49 nm to 2.01 nm,and the 1D meridional RMS error reached 1.0 nm.The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.
Qiu-Shi Huang、Han-Dan Huang、Qiao-Yu Wu、Jun Yu、Zhong Zhang、Zhan-Shan Wang
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MOE Key Laboratory of Advanced Micro-Structured Materials,Institute of Precision Optical Engineering(IPOE),School of Physics Science and Engineering,Tongji University,Shanghai 200092,People's Republic of China
Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,Tongji University,Shanghai 200092,People's Republic of China
Shanghai Frontiers Science Center of Digital Optics,Tongji University,Shanghai 200092,People's Republic of Chi
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