Study on the characteristics of mini-cathode anti-emission coating based on THz vacuum devices
In order to meet the demand of THz vacuum devices for miniature electron beam with high current density,a kind of miniature cathode has been prepared by depositing Ta/Zr coating on impregnated scandate cathode surface via dual Ion-Beam-Assisted Deposition(Dual IBAD)and etching an emission zone with a diameter of 100 m via Focus Ion Beam(FIB).Based on the previous study,this paper focuses on the characteristics of anti-emission coating.It is shown in the experimental results that Ta/Zr coating prepared by dual Ion Beam Assisted Deposition(Dual IBAD)can suppress electron emission more effectively and has a longer life time than that prepared by magnetron sputtering.The reasons for the sound anti-emission performance are that composition with high work function is formed in the process of Barium diffusion into the Ta/Zr coating,and that Barium diffusion is effectively suppressed by the high dense Ta/Zr coating.
THz vacuum devicesmini cathodeDual Ion Beam Assisted DepositionTa/Zr anti-emission coating
国家科技期刊平台
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万方数据
维普
