Micro-Electro-Mechanical Systems(MEMS)inertial switches are passive electronic devices that integrate sensing and actuation.They have the advantages of small size,light weight,easy integration,good processing consistency,and no need for assembly.They have a broad application prospect in fields such as the automotive industry,aerospace,and military equipment.The application scenarios of low-g value MEMS inertial switches are mainly for triggering specific functions during the acceleration/deceleration process of aircraft.In the design,it is necessary to ensure low spring stiffness and a large mass block volume,which poses certain difficulties in structural design and processing technology.This paper introduces the basic physical model and working principle of low-g value MEMS inertial switches,discusses the current research status at home and abroad,summarizes the key issues that urgently need to be addressed at this stage,and proposes corresponding solutions,providing beneficial references for subsequent research.
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