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石墨烯/钽酸锂场效应晶体管温度电阻特性研究

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二维石墨烯材料的原子尺度厚度和其可调的能带结构使其对电介质环境高度敏感,从而使得石墨烯/电介质材料体系对外界多种物理量有敏感响应特性。通过制备石墨烯/钽酸锂热释电栅场效应晶体管并分析该体系的电学传输特性,研究了石墨烯/钽酸锂体系对温度的敏感性,证明该体系中石墨烯载流子浓度的变化与外界温度的变化成正比。场效应晶体管器件在不同温度下的伏安特性表明,25 ℃时石墨烯沟道的阻值约为3850Ω,随着温度的升高电阻变大。器件的温度响应曲线表明,当温度升高至61。2 ℃时,该体系电阻达到最大值(7900Ω),继续升温电阻减小。当温度(T)介于30~61。2 ℃之间时,其温度电阻系数(TCR)约为3。2%·℃-1,当温度介于61。2~66 ℃之间时,其TCR约为-3。94%·℃-1。温度变化引起钽酸锂表面电场发生变化,而石墨烯的载流子浓度及种类可随电场强度发生变化,从而导致其电阻随温度变化。石墨烯/钽酸锂材料体系可应用于热探测器领域。
Temperature-Resistance Behavior of Graphene/Lithium Tantalate Field Effect Transistor
Graphene is a two-dimensional material with a hexagonal honeycomb lattice structure composed of carbon atoms periodical-ly arranged.It has excellent optical,electrical,and mechanical properties.The conduction band and valence band of intrinsic gra-phene intersect in the Brillouin zone,which is a zero-band gap semiconductor material.Graphene has little effect on its resistance due to temperature,so it is difficult to be applied to temperature sensors.However,the atomic-scale thickness of the single to several lay-ers of graphene and its adjustable energy band structure make it highly sensitive to the dielectric environment,which makes the gra-phene/dielectric material system sensitive to a variety of external physical quantities,so the band gap of graphene can be regulated by a variety of methods,among which the electric field control is the most common methods in order to regulate the resistance of gra-phene.Lithium tantalate(LiTaO3)is a material with trigonal distortion perovskite structure.Due to its non-centrosymmetric structure,it has good pyroelectric properties.The carrier concentration of graphene can be changed by the polarization of LiTaO3 when graphene is integrated on its surface,so it results in the resistance changing,thereby converting the thermal signal into an electric signal.For the graphene/pyroelectric material composite structure,the surface of the pyroelectric material is affected by the thermal field to pro-duce a higher polarization electric field,which can effectively affect the carrier transport performance of graphene.Therefore,the gra-phene/LiTaO3 material system can be used as the key material for the thermal detector.The graphene/LiTaO3 material system had been studied in this paper.The influence of temperature on the system was theoretically explained and it also showed that the change of the graphene carrier concentration was proportional to the change of temperature in the system.Based on this property,a new type of the thermal detector was made by integrating graphene on the surface of LiTaO3.Au-graphene-Au structure was prepared on the pyroelec-tric material to analyze the influence of temperature changes on the graphene channel resistance.The pyroelectric substrate was a 40μm thick Z-cut single-sided polished LiTaO3 wafer.Oxygen plasma was used to treat the surface of LiTaO3 substrate in order to improve the hydrophilicity of LiTaO3 substrate and its surface cleanliness,also reduce the appearance of cracks and wrinkles on the graphene surface.Then the graphene was transferred to LiTaO3 substrate by wet transfer,and a 30 μm× 100 μm graphene channel was prepared through photolithography and etching(oxygen plasma,20 W for 20 s)processes.Finally,a lift-off process was used to prepare Ti/Au(5 nm/50 nm)electrodes deposited by using thermal evaporation deposition,thereby preparing a back-gate graphene/LiTaO3 field ef-fect transistor.The number of layers and the defect concentration of graphene were characterized by Raman spectroscopy,and the re-sult showed that its D peak position was at 1346.72 cm-1,the G peak position at 1594.58 cm-1 and 2D peak position at 2684.2 cm-1,which was in line with Raman characteristic peak of graphene.2D/G peak intensity ratios,I2D/IG was 1.8,which showed that the gra-phene was a single layer and D peak intensity ID was small,which showed that there were few defects in the graphene.Then the temper-ature response of the device was texted by the semi-conductor parameter analyzer.By analyzing the Volt-Ampere characteristic curves at different temperatures,it was found that the contact between the graphene and the metal electrode was an Ohmic contact.At room temperature,the resistance of the device was 3800 Ω.As the temperature increased,the resistance of the device increased,which was due to the polarization of LiTaO3.The resistance of the device changed with temperature.This was because the polarization strength of lithium tantalate changed with the change of temperature,which changed the hole carrier concentration of graphene surface,and then led to the resistance change.When the temperature was between 30 and 61.2 ℃,the resistance increased with the increase of tempera-ture,and the resistance temperature coefficient was 3.20%·℃-1.When the temperature was between 61.2 and 66.0 ℃,the resistance decreased with the increase of temperature,and the resistance temperature coefficient was-3.94%·℃-1.The inflection point of the re-sistance at 61.2 ℃ was attributed to the polarized electric field on the surface of lithium tantalate which caused that Fermi level of gra-phene passed through the Dirac point from the valence band to the conduction band,which changed the type of charge carriers in the graphene and made the carriers changed from holes to electrons.This experiment provided experimental data support for the theoretical study of graphene/pyroelectric material system,and provided a new idea for the subsequent application of graphene/pyroelectric materi-al system to thermal detectors:there were abundant types of pyroelectric materials,and flexible thermal detectors could also be pre-pared by using polymer pyroelectric materials as the substrate.It was hoped that the study could provide data and theoretical support for the high-sensitivity thermal detectors.

graphenegraphene field effect transistorlithium tantalatepyroelectricitytemperature coefficient of resistance(TCR)

金庆喜、连紫薇、赵永敏、明安杰、魏峰、毛昌辉

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中国有研科技集团有限公司智能传感功能材料国家重点实验室,北京 101407

有研工程技术研究院有限公司先进电子材料事业部,北京 101407

北京有色金属研究总院,北京 100088

石墨烯 石墨烯晶体管 钽酸锂 热释电 温度电阻系数(TCR)

国家自然科学基金面上项目国家重点研发计划项目山东省重点研发计划项目

618741372019YFB20057052020CXGC010203

2024

稀有金属
北京有色金属研究总院

稀有金属

CSTPCD北大核心
影响因子:1.483
ISSN:0258-7076
年,卷(期):2024.48(7)