首页|面向功率器件封装的纳米铜烧结连接技术研究进展

面向功率器件封装的纳米铜烧结连接技术研究进展

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随着第三代半导体SiC和GaN的快速发展,传统的Si基器件用封装材料己不能满足功率器件在高功率密度和高温环境下可靠服役的需求.纳米铜烧结连接技术不仅能够低温连接、高温服役,同时具有优异的导热、导电性能和相对于纳米银较低的成本,在功率器件封装研究领域备受关注,纳米铜焊膏成为最有潜力的耐高温封装互连材料之一.本文从纳米铜焊膏的制备、影响烧结连接接头性能的因素以及接头的可靠性3个方面综述了当前纳米铜烧结连接技术的研究进展,阐明了纳米铜颗粒的氧化行为及对应措施,并重点论述了纳米铜烧结连接接头的高温服役可靠性与失效机理,旨在促进低成本的纳米铜烧结连接技术在高性能、高可靠功率器件封装中的应用.
Research Progress of Cu Nanoparticle Sintering Technology for Power Electronic Packaging
With the rapid development of the third-generation semiconductors SiC and GaN,traditional packaging materials,such as Si-based lead-free solder,cannot satisfy the requirements of high-power density and high-temperature loading in power electronic devices any more.Nowadays,the joints packaged by Cu nanoparticle sintering technique can not only be bonded at low-temperature and then serve at high-temperature,but also exhibit excellent thermal conductivity,electrical conductivity and relatively lower cost comparing with Ag nanoparticles.Thus,more and more attention has been attracted in the field of Cu nanoparticle sintering technique for power electronic packaging,which makes Cu nanoparticles become one of the most potential high-temperature-resistant packaging and interconnection materials.In this work,the current research progress of Cu nanoparticle sintering technique was summarized,including the fabrication of Cu nanoparticle pastes,the factors affecting the performance of sintered joints and the reliability of joints.Meanwhile,the oxidation behavior as well as the anti-oxidation methods of Cu nanoparticle were introduced.Besides,the high-temperature working reliability and failure mechanism of Cu nanoparticle sintered joints were discussed.This review aims to promote the application of low-cost Cu nanoparticle sintering technique for high-performance and high-reliability power electronic packaging.

power electronic devicesthird-generation semiconductorchip packagingCu nanoparticlelow-temperature sinteringreliability

马立民、鲁子怡、贾强、王乙舒、张宏强、周炜、邹贵生、郭福

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北京工业大学材料与制造学部,北京 100124

北京航空航天大学机械工程及自动化学院,北京 100191

清华大学机械工程系,北京 100084

北京联合大学机器人学院,北京 100101

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功率器件 第三代半导体 芯片封装 纳米铜颗粒 低温烧结连接 可靠性

国家自然科学基金国家自然科学基金北京市教委-市基金联合资助项目

5220532452075287KZ202210005005

2024

稀有金属材料与工程
中国有色金属学会,中国材料研究学会,西北有色金属研究院

稀有金属材料与工程

CSTPCD北大核心
影响因子:0.634
ISSN:1002-185X
年,卷(期):2024.53(1)
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