基于NS-DSMC耦合方法与Langmuir探针诊断的射频等离子体氧化过程中等离子体分布
Plasma Distribution in RF Plasma Oxidation Process Based on NS-DSMC Hybrid Method and Langmuir Probe Diagnostic
刘万锁 1王志宝 2王庆 1蔺增1
作者信息
- 1. 东北大学机械工程及自动化学院,辽宁沈阳 110819
- 2. NeuMat(泰安)表面技术有限公司,山东泰安 250111;泰安真空表面工程工业技术研究院,山东泰安 250111
- 折叠
摘要
采用Navier-Stokes方程和直接模拟蒙特卡罗方法相结合的方式模拟了反应腔内的气体流动,并结合Langmuir探针检测设备分析了气体流速与等离子体密度的关系.结果表明,流体均匀性对等离子体的均匀性有显著影响.在6.5 Pa的压力下,等离子体密度和流速呈正相关,与在大气压下的实验结果一致,说明提高流体均匀性可以提高等离子体的氧化均匀性.
Abstract
The combined method of Navier-Stokes equation and direction simulation Monte-Carlo method was used to simulate the flow in the reaction chamber,and the relationship between gas flow velocity and plasma density was analyzed by the Langmuir probe detection equipment.Results show that the flow uniformity can significantly impact the plasma uniformity.Under the pressure of 6.5 Pa,the plasma density and flow velocity show a positive correlation,which is consistent with the experiment results in atmosphere pressure.This research verifies that improving the flow uniformity can enhance the plasma oxidation uniformity.
关键词
等离子体氧化/等离子体诊断/NS-DSMC方法/Langmuir探针/等离子体均匀性Key words
plasma oxidation/plasma diagnosis/NS-DSMC method/Langmuir probe/plasma uniformity引用本文复制引用
基金项目
国家自然科学基金(51775096)
Chinese Academy of Sciences WEGO Research Development Plan([2007]006)
中央高校基本科研业务费专项(N2003009)
出版年
2024
NETL
NSTL
万方数据