Effect of Ar/N2-Ar Co-sputtering Ti Doping on Optical and Mechanical Properties of Ta2O5 Coatings
In order to explore the effects of Ti doping on the optical and mechanical properties of Ta2O5 coatings prepared by Ar/N2-Ar co-sputtering,Ta2O5,N2-Ta2O5,Ti-Ta2O5,and N2-Ti-Ta2O5 coatings were prepared on the glass substrate surface by radio frequency and direct current magnetron co-sputtering techniques.The microstructures and surface morphologies of Ta2O5,N2-Ta2O5,Ti-Ta2O5,and N2-Ti-Ta2O5 coatings were characterized by X-ray diffraction(XRD),scanning electron microscope(SEM),and atomic force microscope(AFM).The optical parameters of the coatings were tested by ultraviolet-visible spectrophotometry.The hardness and Young's modulus of the coatings were tested by nanoindentation.XRD test results show that the Ta2O5,N2-Ta2O5,Ti-Ta2O5,and N2-Ti-Ta2O5 coatings mainly consist of amorphous phase structure with Ta2O5 as the main body.SEM and AFM results show that the coatings deposited on the glass substrate do not have extensive voids.The sputtered particles are uniformly piled and grow on the substrate surface.The coating thicknesses are basically the same and the thickness error is within 5％.The separate introduction of N2,Ti,and N2-Ti co-doping can reduce the roughness of Ta2O5 coatings.The optical test results show that the separate introduction of N2 and Ti element can increase the average transmittance of Ta2O5 coatings to more than 81％,whereas the average transmittance of N2-Ti-Ta2O5 coatings prepared by N2-Ti co-doping reduces.Mechanical test results show that compared with that of Ta2O5 coating,the hardness of N2-Ta2O5 and N2-Ti-Ta2O5 coatings increases significantly.The hardness of Ti-Ta2O5 coatings is basically the same.The elasticity index(H/E)and plasticity index(H3/E2)indicate that the N2-Ta2O5 and N2-Ti-Ta2O5 coatings possess better fracture toughness and plastic deformation resistance.The preparation of N2-and Ti-doped Ta2O5 coatings on glass surface can obtain the multifunctional coatings with both excellent optical and mechanical properties,which is represented by N2-Ta2O5 and N2-Ti-Ta2O5 coatings.
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