Design of Planar Interdigital Capacitance Sensor Based on Variable Wavelength Matrix Structure
Aiming at the problems of limited penetration depth and low measurement accuracy in the measurement of dielectric constant of ceramic materials using planar interdigital capacitive sensors,an improvement scheme is pro-posed.The new sensor adopts an electrode matrix structure and incorporates a wavelength gradient design.By using COMSOL Multiphysics finite element simulation software,the static electric field distribution of the sensor matrix is ana-lyzed,and the signal variation trends under different electrode combinations are compared.The electrode matrix structure is optimized.The experimental results show that the improved cross finger capacitive sensor has a penetration ability of more than 4 mm in ceramic materials,which is more than twice the detection capability of traditional structural sensors.
interdigital capacitancepermittivitypenetration depthfinite element simulation
万方数据
维普
