Aiming at the problems of limited penetration depth and low measurement accuracy in the measurement of dielectric constant of ceramic materials using planar interdigital capacitive sensors,an improvement scheme is pro-posed.The new sensor adopts an electrode matrix structure and incorporates a wavelength gradient design.By using COMSOL Multiphysics finite element simulation software,the static electric field distribution of the sensor matrix is ana-lyzed,and the signal variation trends under different electrode combinations are compared.The electrode matrix structure is optimized.The experimental results show that the improved cross finger capacitive sensor has a penetration ability of more than 4 mm in ceramic materials,which is more than twice the detection capability of traditional structural sensors.
interdigital capacitancepermittivitypenetration depthfinite element simulation
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