High Temperature Test System Based on High Precision NiCr/NiSi Thin Film Thermocouple
A high-precision temperature measurement method based on thin-film thermocouples was proposed to meet the ur-gent need for temperature measurement in high-temperature and harsh environments,such as turbine blades and combustion chamber walls in aviation engines.NiCr/NiSi thin-film thermocouples were prepared on SiC substrates using magnetron sputte-ring.The design and fabrication of the thin-film thermocouples were completed,and a high-precision temperature data acquisition system was designed.The main control chip adopted STM32,and the data acquisition chip used a 16-bit high-precision chip ADS1118,enabling real-time temperature data acquisition in high-temperature and harsh environments.The results show that the designed and fabricated NiCr/NiSi thin-film thermocouples can achieve stable temperature measurement at-40℃to 1 000℃.The high-precision temperature measurement system has an error better than±0.4％compared to the standard temperature meas-urement system,providing an effective and reliable solution for temperature measurement in high-temperature and harsh environ-ments.
high temperaturehigh precisionthin film thermocoupletemperature measurement circuit
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