高精度NiCr/NiSi薄膜热电偶高温测试系统
High Temperature Test System Based on High Precision NiCr/NiSi Thin Film Thermocouple
阮勇 1肖倩 2韩玉宁 2刘海龙 2李嘉恒 2吴宇 3石萌 4董和磊5
作者信息
- 1. 清华大学精密仪器系
- 2. 北京信息科技大学仪器科学与光电工程学院
- 3. 启元实验室
- 4. 淄博高新技术产业开发区MEMS研究院
- 5. 中北大学半导体与物理学院
- 折叠
摘要
针对航空发动机涡轮叶片和燃烧室内壁等高温恶劣环境下对温度测量的迫切需求,提出了一种基于薄膜热电偶的高精度测温方法.采用磁控溅射法在SiC 衬底上制备了 NiCr/NiSi薄膜热电偶.完成了薄膜热电偶的设计与制备,并设计了一套高精度温度数据采集系统,主控芯片采用STM32,数据采集芯片采用16 位高精度芯片ADS1118,实现了对高温恶劣环境下温度数据的实时采集.结果表明:设计制备的NiCr/NiSi薄膜热电偶能够实现-40～1 000℃温度区间稳定测温,高精度测温系统与标准温度测量系统相比误差优于±0.4％,为高温恶劣环境下温度测量提供了有效且可靠的解决方法.
Abstract
A high-precision temperature measurement method based on thin-film thermocouples was proposed to meet the ur-gent need for temperature measurement in high-temperature and harsh environments,such as turbine blades and combustion chamber walls in aviation engines.NiCr/NiSi thin-film thermocouples were prepared on SiC substrates using magnetron sputte-ring.The design and fabrication of the thin-film thermocouples were completed,and a high-precision temperature data acquisition system was designed.The main control chip adopted STM32,and the data acquisition chip used a 16-bit high-precision chip ADS1118,enabling real-time temperature data acquisition in high-temperature and harsh environments.The results show that the designed and fabricated NiCr/NiSi thin-film thermocouples can achieve stable temperature measurement at-40℃to 1 000℃.The high-precision temperature measurement system has an error better than±0.4％compared to the standard temperature meas-urement system,providing an effective and reliable solution for temperature measurement in high-temperature and harsh environ-ments.
关键词
高温/高精度/薄膜热电偶/测温电路Key words
high temperature/high precision/thin film thermocouple/temperature measurement circuit引用本文复制引用
基金项目
国家重点研发计划(2020YFB2009103)
出版年
2024
NETL
NSTL
万方数据