Design and Simulation of Slotted Four-beam Piezoresistivity Accelerometer Based on 4H-SiC
A slotted four beam piezoresistive accelerometer based on 4H-SiC was designed.The relevant parameters of the slot were determined by analyzing the effects of slot position and slot size on sensor sensitivity and natural frequency.The thermal mechanical coupling simulation of the structure was carried out using finite element method,and the theoretical voltage output of the structure under different temperature fields under different loads was determined.The research results show that compared to the traditional double ended four beam structure,the output sensitivity of this structure is increased by 51.4％,and the natural frequency is only reduced by 14.2％.The sensor exhibits a linear relationship between input load and output voltage in a steady-state temperature field environment of ANSYS 600℃with a theoretical full scale output of 39.71 mV.
4H-SiCslotpiezoresistive accelerometerfinite element simulationthermal-mechanical coupling simulation
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