Study on Error Analysis and Suppression Methods of Absolute Linear Displacement Sensor Based on Eddy Effect
Absolute linear displacement sensors based on the eddy current effect are characterized by a simple structure,high resolution,fast response and strong anti-interference ability.Compared with incremental displacement sensors,sensors of this type are not only unaffected by power cuts,but also can faster and more accurate absolute positioning.However,the sensors have much possibility to encounter first-order,second-order and four-order errors in pitch when any stage,such as fabrication,installment and signal processing,is not as good as desired.In order to solve above described problems,the first-order and second-order errors were suppressed using signal compensation,and the four-order error was suppressed by eliminating the three-order harmonic using spatial phase shifting.By doing error suppression experiments on optimized sensors,it is verified that the analysis about the sources of errors and the suppression methods are valid.Experimental results show that the peak-to peak error of the sensor opti-mized from 32 μm to 6 μm under error suppression,and significantly improved performance.
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