压电式多维力传感器研究
Research of Piezoelectric Multidimension Force Sensor
张军 1仲育颉 1任宗金 1钱敏 1王郁赫 1张鹏1
作者信息
- 1. 大连理工大学机械工程学院,高性能精密制造全国重点实验室
- 折叠
摘要
针对传统压电测力仪有效测试区域有限、在不同测试位置输出结果不一致、扭矩值获取繁琐的等问题,基于传感器布置方式及石英晶片切型的特点,提出一种采用正八边形晶片的多维力传感器.在理论分析的基础上,通过计算仿真验证了正八边形晶片的设计合理性.对研制的多维力传感器进行了标定实验,标定结果显示:各传感器切向灵敏度高、各向线性及重复性好、向间干扰小,具有良好的测试性能.
Abstract
Aiming at the problems of traditional piezoelectric dynamometer such as limited effective testing area,inconsistent output results at different test positions and tedious torque value acquisition,a multi-dimensional force sensor based on regular oc-tagonal chip was proposed based on sensor layout and the characteristics of quartz chip cutting.On the basis of theoretical analy-sis,the design rationality of regular octagon chip was verified by calculation and simulation.The calibration experiments of the de-veloped multi-dimension force sensor were carried out.The calibration results show that the sensors have high tangential sensitivi-ty,good anisotropic linearity and repeatability,little interdirectional interference and good test performance.
关键词
切削力测量/压电式测力仪/压电传感器/标定实验Key words
cutting force measurement/piezoelectric dynamometer/piezoelectric sensor/calibration experiment引用本文复制引用
基金项目
国家自然科学基金(52075097)
国家科技重大专项(J2019-V-0011-0106)
国家重点研发计划(2019YFA0709000)
出版年
2024
NETL
NSTL
万方数据