Compensation Method of Circular Grating Angle Measurement Error Based on VMD
An error reconstruction and compensation method based on variational modal decomposition(VMD)was proposed for the error data of the angle measurement system of angle grating.First,the VMD was used to adaptively decompose the error da-ta into several intrinsic mode functions(IMF),characterized the degree of noise content based on the correlation factor value of each IMF,selected the eligible IMF to reconstruct the system error,and then traced back to analyze the main harmonic orders of the system error to establish the error compensation model.The experimental results show that the mean,peak-to-peak and stand-ard deviation of the angle measurement error of the angle encoder can be compensated to-0.029″(compensation percentage is 90.73%),1.14″(compensation percentage is 51.07%)and 0.29″(compensation percentage is 57.35%)by this method,the main components of the error can be correctly identified even after adding random errors.
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