Design and Simulation Analysis of Electromagnetic Force Feedback System Toward Micro-accelerometer
An electromagnetic feedback system was designed for the closed-loop control of capacitive acceleration sensors to meet the needs of high precision acceleration sensors for inertial navigation,which can keep high mechanical sensitivity and im-prove the range of acceleration sensors simultaneously.A closed-loop control model of capacitive micro-electro-mechanical-system acceleration sensors was established and finite element analysis of the electromagnetic structure was performed.The simulation re-sults show that the electromagnetic force has capable of 1.509 mN when the coil current is 277.3 μA.The closed-loop control can be realized by the feedback system within the range of±5g(g=9.8 m/s2)when the input feedback voltage is from-19.1 mV to 19.1 mV.The calculation results show that the mechanical noise of the structure equals to be 1.22×10-8 g/Hz1/2.The feedback voltage of the capacitive MEMS acceleration sensors closed-loop control system with a sensitivity of 3.8 mV/g,which has a good linear relationship with the input acceleration within the range of±5g by the Simulink analysis.
accelerometerelectromagnetic forcefeedbackfinite element simulationrange
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