Vibration Measurement Method Based on Position Sensitive Detector and Accelerometer
Non-contact vibration measurement methods,which are non-invasive and can be easily arranged,are widely used in industrial production and scientific research experiments.However,these methods seldom take into consideration the impact caused by shocks from the environment on the measurement system.In this paper,a low-cost vibration measurement method of vi-bration self-compensation was proposed.A position-sensitive detector was used to measure the vibration signal,while a MEMS accelerometer was used to compensate for the vibration of the measurement system itself.An experimental system was built to veri-fy this method.The results show that the relative vibration between the measurement system and the target can be acquired with a position sensitive detector,while the vibration of the system induced by environment changes or shocks can be measured with a MEMS accelerometer.The performance of the vibration measurement system suffering from environmental shocks based on the po-sition-sensitive detector has been significantly improved after the compensation of the MEMS accelerometer.
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