Frequency Measurement and Stability Analysis of Resonant Micro-accelerometer
To meet the requirements of high-precision frequency measurement and fast analysis of long-term frequency stability for the micromechanical resonant accelerometer,a fast theoretical variance#1 was introduced based on the summary of Allan variance and original#1 theoretical variance.The experimental results show that fast#1 theoretical variance has good accuracy and can run quickly under different sampling intervals,and is superior to Allan variance and original theoretical variance#1.The smaller the sampling interval is,the better the stability analysis of resonance frequency is.For the resonant micro-accelerometer developed,the fast theoretical variance#1analysis method can complete the frequency stability analysis for 1 hour within 1 second,which provides the basis for the development of high precision micromechanical resonant acceleration sensor.
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