Research on Flow Measurement Method of Fluid in Micro-tube of Diameter
As the growth of precision manufacturing industries such as semiconductor at home,the measurement demanding for micro-tube of diameters is increasingly.To fill the gap in the flow measurement of micro-tube diameters at home,a tempera-ture-independent ultrasonic measurement design for liquid flow meter for micro-tube diameter was proposed.Firstly,the design ex-plained the principle of ultrasonic flow measurement and the method of calculating flight time based on ultrasonic signal charac-teristics in detail.Secondly,the synchronization of the signal timing was ensured according to the measurement accuracy require-ments.Through a prototype with the STM32 controller as its core,the real-time measurement of flow data was achieved.Finally,the measurement experiment platform was established to verify the effectiveness of this design method.The experimental results indicate that when measuring liquid through a DN4 pipeline,the relative error is within 2.0%for measurements when the flow rate range is between 5 mL/min and 50 mL/min and within 1.5%for measurements when the flow rate range is between 50 mL/min and 800 mL/min,which meets the industrial production requirements and has good practicality.
micro-tube of diametersultrasonic measurementembedded system
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