摘要
随着国内半导体等精密制造业的发展,对于微小管径的计量需求不断增加.为弥补国内在微小管径的流量计量方面的不足,提出一种与温度无关的超声波测量微小管径的液体流量计设计方法.首先,阐述了超声波测量流量的原理,详细解释了基于超声信号特征点计算飞行时间的方法,然后根据测量精度要求保证了信号时序的同步,通过以STM32 控制器为核心的样机实现了流量数据的实时测量,最后,搭建测量实验平台,验证该方法的有效性.以DN4 管道进行液体流量检测实验,实验结果表明流量范围为5～50 mL/min时,测量相对误差均在2.0%以内,流量范围为50～800 mL/min时,测量相对误差均在1.5%以内,满足工业生产要求,具有较好的实用性.
Abstract
As the growth of precision manufacturing industries such as semiconductor at home,the measurement demanding for micro-tube of diameters is increasingly.To fill the gap in the flow measurement of micro-tube diameters at home,a tempera-ture-independent ultrasonic measurement design for liquid flow meter for micro-tube diameter was proposed.Firstly,the design ex-plained the principle of ultrasonic flow measurement and the method of calculating flight time based on ultrasonic signal charac-teristics in detail.Secondly,the synchronization of the signal timing was ensured according to the measurement accuracy require-ments.Through a prototype with the STM32 controller as its core,the real-time measurement of flow data was achieved.Finally,the measurement experiment platform was established to verify the effectiveness of this design method.The experimental results indicate that when measuring liquid through a DN4 pipeline,the relative error is within 2.0%for measurements when the flow rate range is between 5 mL/min and 50 mL/min and within 1.5%for measurements when the flow rate range is between 50 mL/min and 800 mL/min,which meets the industrial production requirements and has good practicality.
基金项目
河南省科技研发重点项目(225200810038)
河南省自然科学基金项目(232300421207)
NETL
NSTL
万方数据