Design of Double L-beam Capacitive Six-axis Force Sensor
To design a high performance capacitive six-axis force sensor,a double L-shaped elastic beam structure was con-structed by combining the advantages of T-shaped beam and cross shaped double straight beam,the sensor conversion element adopteda differential structure parallel plate capacitor to reduce the measurement error of the sensor,the combination of particle swarm algorithm and finite element simulation,with the condition number of the transformation matrix as the objective function,was applied to optimize the structural parameters of the sensor,after obtaining the optimal structural parameters,simulation was conducted,and the results show that the simulation accuracy of the capacitive six-axis force sensor with this configuration was 0.425 8%.Finally,processing and calibration experiments were conducted on the sensor,and the results show that the experimen-tal accuracy of the sensor reached 0.637 6%.
万方数据
维普
