There are complex parasitic capacitors among the movable mass,substrate and electrode of micromechanical gyro-scope,leading to the feedthrough effect between the feedback electrode and the detection readout electrode.To investigate the in-fluence of the feedback effect on the scale factor characteristics of MEMS gyroscopes,theoretical modeling was employed to ana-lyze the impact of the feedthrough effect on the open-loop zero distribution of the detection circuit under different mode frequency differences.Subsequently,the influence of the mode frequency difference on the scale factor in the presence of feedthrough was examined.A force feedback simulation model was established to reflect the impact of feedthrough.Finally,a feedthrough suppression scheme based on time-division control was designed,and the experimental result demonstrate that without feedthrough suppression and with buffered period time-division control,the maximum variation in the scale factor is 70.2%and 1.3%,respec-tively.Both simulation and experimental results indicate that the more significant the feedthrough effect is,the greater the ampli-tude of scale factor variation with mode frequency difference is.
关键词
馈通效应/模态频差/标度因数/零点分布/分时控制/馈通抑制
Key words
feedthrough effect/mode frequency difference/scale factor/zero distribution/time-sharing control/feedthrough sup-pression
维普
万方数据