Design of Charge-induced MEMS Electric Field Sensor Based on Mode Localization
A new charge-induced electric field sensor based on mode localization was designed in this paper.The sensitivity of the sensor was improved by using the large amplitude ratio caused by mode localization in weakly coupled resonant systems.The sensitive structure of the sensor was a three-degree-of-freedom weakly coupled resonant system.The electric field above the sensitive structure was shielded by adding a shielding plate,and the output was in the form of the induced current ratio between the unshielded resonator and the shielded resonator.Through theoretical analysis and simulation verification,the key indexes of the sensor were determined.The fabrication process of the sensor was achieved and test experiment was conducted.The experi-mental results show that the sensitivity of the sensor is 0.119 m/kV and the linearity is 5.8%.
MEMSelectric field sensorcharge inductionmode localization
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