In this paper,an improved Surface Acoustic Wave(SAW)temperature and pressure sensor with two chambers is pro-posed to solve the nonlinear coupling problem in the integrated structure suggested in earlier studies,and the design and experimen-tal study of an acoustic surface wave all quartz pressure sensor is carried out.Based on the finite element method and perturbation theory,the response mechanism of the quartz-based SAW pressure sensor is analyzed,the coupled mode theory is used to optimize the design of the three-resonator-type sensitive element,and the glass paste bonding is used to realize the quartz cross-lead hermetic encapsulation,and the preparation of the SAW allquartz pressure sensor is realized.The test results show that the developed SAW all quartz pressure sensor has a pressure range of 0～500 kPa,a linearity of 0.415%FS,a pressure sensitivity of 551 kHz/MPa,and a temperature coefficient of sensitivity of 0.134%over the operating temperature range of 0℃～120℃.The development of this sur-face acoustic wave all quartz pressure sensor lays the foundation for the subsequent realization of wireless passive measurement of the sensor.
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