Using finite element simulation software,the film bulk acoustic resonator(FBAR)model was estab-lished.The study focused on investigating the effects of different electrode shapes(rectangular,trapezoidal,circu-lar,and regular pentagonal)and apodization angles(30°,36°,40°,and 45°)on parasitic resonances under different resonant areas(3 600-10 000 μm2).The smith impedance curves and non-circularity values were obtained.The study also explored the suppression effects of stepped load structures on lateral acoustic wave leakage.The simula-tion results show that the non-regular pentagonal electrode shape with a apodization angle of 40° exhibits the best suppression effect on parasitic resonances.For the resonant area of 3 600 μm2,its non-circularity value is 6.45%,which is comparable to the rectangular electrode at a resonant area of 10 000 μm2.The designed stepped load struc-ture significantly enhances the quality factor at the parallel resonance point.With a lateral dimension of 60 μm,the second-order electrode load structure achieves a quality factor of 1 378,which is 10.07%higher than that of the structure without electrode load.
film bulk acoustic resonator(FBAR)finite element simulationresonant areaparasitic resonancequality factor
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