边缘空气层薄膜体声波谐振器的设计与制备
Design and Preparation of Thin Film Bulk Acoustic Resonators with Edge Air Layers
朱宇涵 1段兰燕 2陈志鹏 1许锴镔 1胡晗 1衣新燕 3李国强4
作者信息
- 1. 华南理工大学 发光材料与器件国家重点实验室,广东 广州 510640
- 2. 中兴通讯股份有限公司,广东 深圳 518057
- 3. 广州市艾佛光通科技有限公司,广东 广州 510700
- 4. 华南理工大学 发光材料与器件国家重点实验室,广东 广州 510640;广州市艾佛光通科技有限公司,广东 广州 510700
- 折叠
摘要
压电薄膜存在固有的对压电效应的非线性迟滞响应,并且声波有向边缘传播的横波分量,二者都会产生声波的能量损耗.该文设计了一种具有边缘空气层结构的单晶氮化铝薄膜体声波谐振器,可以减小非线性迟滞的机电损耗并阻止横波能量泄露,提高谐振器的品质因数.使用COMSOL对设计的器件进行有限元模拟仿真,并成功制备出具有边缘空气层结构的谐振器进行测试验证.
Abstract
The piezoelectric film has an inherent nonlinear hysteresis response to the piezoelectric effect,and the sound wave has a shear wave component that propagates toward the edge,both of which will cause energy loss of the sound wave.In this paper,a single-crystalline aluminum nitride thin film bulk acoustic wave resonator(SA-BAR)with an edge air layer structure is designed,which can reduce the electromechanical loss of nonlinear hystere-sis,prevent the leakage of shear wave energy,and improve the quality factor of the resonator.COMSOL is used to conduct finite element simulation of the device,and a resonator with an edge air layer structure was successfully pre-pared for testing and verification.
关键词
单晶氮化铝薄膜体声波谐振器/边缘空气层/有限元仿真/压电非线性效应Key words
single-crystal aluminum nitride thin film bulk acoustic wave resonator(SABAR)/edge air layer/fi-nite element simulation/piezoelectric nonlinear effect引用本文复制引用
基金项目
国家重点研发计划项目(2022YFB3604500)
国家重点研发计划项目(2022YFB3604501)
出版年
2024
NETL
NSTL
万方数据