首页|边缘空气层薄膜体声波谐振器的设计与制备

边缘空气层薄膜体声波谐振器的设计与制备

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压电薄膜存在固有的对压电效应的非线性迟滞响应,并且声波有向边缘传播的横波分量,二者都会产生声波的能量损耗.该文设计了一种具有边缘空气层结构的单晶氮化铝薄膜体声波谐振器,可以减小非线性迟滞的机电损耗并阻止横波能量泄露,提高谐振器的品质因数.使用COMSOL对设计的器件进行有限元模拟仿真,并成功制备出具有边缘空气层结构的谐振器进行测试验证.
Design and Preparation of Thin Film Bulk Acoustic Resonators with Edge Air Layers
The piezoelectric film has an inherent nonlinear hysteresis response to the piezoelectric effect,and the sound wave has a shear wave component that propagates toward the edge,both of which will cause energy loss of the sound wave.In this paper,a single-crystalline aluminum nitride thin film bulk acoustic wave resonator(SA-BAR)with an edge air layer structure is designed,which can reduce the electromechanical loss of nonlinear hystere-sis,prevent the leakage of shear wave energy,and improve the quality factor of the resonator.COMSOL is used to conduct finite element simulation of the device,and a resonator with an edge air layer structure was successfully pre-pared for testing and verification.

single-crystal aluminum nitride thin film bulk acoustic wave resonator(SABAR)edge air layerfi-nite element simulationpiezoelectric nonlinear effect

朱宇涵、段兰燕、陈志鹏、许锴镔、胡晗、衣新燕、李国强

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华南理工大学 发光材料与器件国家重点实验室,广东 广州 510640

中兴通讯股份有限公司,广东 深圳 518057

广州市艾佛光通科技有限公司,广东 广州 510700

单晶氮化铝薄膜体声波谐振器 边缘空气层 有限元仿真 压电非线性效应

国家重点研发计划项目国家重点研发计划项目

2022YFB36045002022YFB3604501

2024

10.11977/j.issn.1004-2474.2024.01.003

压电与声光
四川压电与声光技术研究所

压电与声光

CSTPCD北大核心
影响因子：0.357
ISSN：1004-2474
年,卷(期)：2024.46(1)
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