Simulation Study on Lamb Wave Mode Bulk Acoustic Wave Piezoelectric Resonator
With the development of modern communication technology,the demand for high-performance RF de-vices becomes more and more urgent.BAW resonators meet the needs of high-frequency applications with their unique advantages and have become one of the hot research directions in the current RF devices.In this paper,a Lamb wave S0 mode BAW resonator based on interdigital electrodes is proposed,and the influence of supporting an-chor structure and piezoelectric materials on the Q value of the device is discussed.The effects of the supporting an-chors and piezoelectric materials on the quality factors of the device are discussed.The quality factors of devices with different four anchor structures and three piezoelectric materials are simulated and analyzed.At the same time,based on the aluminum nitride BAW resonator unit obtained by simulation,a BAW filter with a frequency band of 70.36-71.45 MHz is fabricated by trapezoidal cascade.The filter has the insertion loss of>-1 dB,which can be suitable for high-frequency and narrow-band applications.
Lamb wave modefinite element analysisBAW resonatorquality factorequivalent MBVD model
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