压电变形镜驱动器迟滞快速辨识与补偿研究
Research on Rapid Identification and Compensation of Hysteresis in Piezoelectric Deformable Mirror Actuators
汪寒 1肖习 1郭友明 1黄林海 1鲜浩1
作者信息
- 1. 中国科学院光电技术研究所 自适应光学重点实验室,四川 成都 610209
- 折叠
摘要
采用压电陶瓷作为促动机构的主动光学系统.为了对压电陶瓷驱动器固有的迟滞非线性进行有效抑制校正,以提高系统性能,该文对带变形镜镜面负载结构的压电陶瓷驱动器非线性迟滞动态进行了高效辨识建模,实现了带镜面负载的压电陶瓷驱动器相对误差1.886 7%的迟滞参数辨识与建模,降低了辨识算法所需时间90%以上,同时克服了负载结构导致辨识信号信噪比低的问题.实验证明,所用方法得到的压电陶瓷迟滞模型能够有效地用于补偿校正压电陶瓷驱动器迟滞非线性动态带来的误差,通过前馈控制器可将压电陶瓷驱动器迟滞引起的镜面面形定位误差降低56.21%,有效地提升了系统性能.
Abstract
In the context of active optical systems employing piezoelectric actuators as actuation mechanisms,ef-fectively modeling and correcting the inherent hysteresis nonlinearity in piezoelectric actuators is essential for enhan-cing system performance.The paper presents an efficient identification and modeling approach for the nonlinear hys-teresis dynamics of piezoelectric actuators with deformable mirror loads.The proposed method was successfully ap-plied in the identification and modeling of hysteresis for piezoelectric actuators with mirror loads,reducing the runt-ime of the identification algorithm by over 90%with a relative error less than 1.886 7%.Furthermore,this ap-proach overcomes the challenge of low signal-to-noise ratio resulting from the structure.Experimental results dem-onstrate that the piezoelectric hysteresis model obtained through this methodology can effectively compensate for and correct errors induced by the dynamic hysteresis nonlinearity of piezoelectric actuators.By utilizing a feedforward controller,the mirror surface positioning errors caused by piezoelectric hysteresis are reduced by 56.21%,signifi-cantly enhancing overall system performance.
关键词
压电陶瓷驱动器/主动光学/Preisach模型/迟滞补偿/前馈控制Key words
piezoelectric actuators/active optics/Preisach model/hysteresis compensation/feedforward control引用本文复制引用
基金项目
国家自然科学基金()
国家自然科学基金面上项目()
国家自然科学基金重点项目()
国家自然科学基金重大项目()
中国科学院青年创新促进会资助项目()
中国科学院光电技术研究所前沿部署项目()
出版年
2024
NETL
NSTL
万方数据