Research on Rapid Identification and Compensation of Hysteresis in Piezoelectric Deformable Mirror Actuators
In the context of active optical systems employing piezoelectric actuators as actuation mechanisms,ef-fectively modeling and correcting the inherent hysteresis nonlinearity in piezoelectric actuators is essential for enhan-cing system performance.The paper presents an efficient identification and modeling approach for the nonlinear hys-teresis dynamics of piezoelectric actuators with deformable mirror loads.The proposed method was successfully ap-plied in the identification and modeling of hysteresis for piezoelectric actuators with mirror loads,reducing the runt-ime of the identification algorithm by over 90%with a relative error less than 1.886 7%.Furthermore,this ap-proach overcomes the challenge of low signal-to-noise ratio resulting from the structure.Experimental results dem-onstrate that the piezoelectric hysteresis model obtained through this methodology can effectively compensate for and correct errors induced by the dynamic hysteresis nonlinearity of piezoelectric actuators.By utilizing a feedforward controller,the mirror surface positioning errors caused by piezoelectric hysteresis are reduced by 56.21%,signifi-cantly enhancing overall system performance.
piezoelectric actuatorsactive opticsPreisach modelhysteresis compensationfeedforward control
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