Large Aperture Piezoelectric Fast Pendulum Mirror Based on Flexible Hinge Structure
In order to solve the problem of small deflection angle of the fast reflector driven by piezoelectric actu-ator having a small elongation,a new design scheme for the fast reflector is proposed in this paper.A three-level le-ver type flexible hinge amplification mechanism is used to amplify the displacement of the piezoelectric actuator,and a flexible bearing is used as the motion joint to achieve large angle fixed axis deflection of the fast pendulum mirror.The r theoretical derivation and finite element simulation are used to analyze the maximum deflection angle,equiva-lent stress,resonant frequency and vibration mode of the fast swing mirror.The experimental results show that the designed fast pendulum mirror can achieve mirror deflection of greater than 2mrad,meeting the requirements of wide range and high-precision beam positioning.
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