Measurement of Equivalent Circuit Parameters of Piezoelectric Resonators
The piezoelectric resonators are the basic components for measuring the properties of piezoelectric ma-terials.Based on the microwave network theory and characteristics of piezoelectric resonators,a method for measur-ing the equivalent circuit parameters of piezoelectric resonators using network analyzer and capacitance tester was proposed in this paper.The relationships between equivalent circuit parameters and resonant frequency,anti-reso-nant frequency and insertion loss were derived.Three kinds of piezoelectric resonator samples were made.The per-formance parameters of these three samples were measured by network analyzer and capacitance tester.The equiva-lent circuit parameters of piezoelectric resonators were calculated.Finally,the transmission curve of the measured equivalent circuit was measured by using the microwave simulation software,which was consistent with the meas-ured curve,thus verifying the effectiveness of the method.Compared with the traditional method,the proposed method has the advantages of high-speed and simplicity.
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