基于双向热膨胀流的MEMS陀螺敏感机理分析
Analysis of Sensitivity Mechanism of MEMS Gyro Sensitivity Based on Bidirectional Thermal Expansion Flow
马炫霖 1朴林华 1佟嘉程 1刘珺宇1
作者信息
- 1. 北京信息科技大学 北京市传感器重点实验室,北京 100101
- 折叠
摘要
提出一种新型的基于双向热膨胀流的微机电系统(MEMS)陀螺的基本结构并揭示了其敏感机理,采用有限元方法及利用COMSOL建立三维模型,对双向热膨胀流陀螺敏感元件的温度场进行了计算.结果表明,基于双向热膨胀流的陀螺具有陀螺效应,当输入功率为70 mW,输入角速度为-25～25 rad/s时,陀螺的温度灵敏度为1.577 K·(rad/s)-1,灵敏度为0.064 V·(rad/s)-1,非线性度为6.855%.该陀螺具有灵敏度高,抑制交叉耦合小和结构简单等特点,可用于电子设备、航天和医学仪器等领域.
Abstract
The basic structure of a novel MEMS gyro based on bidirectional thermal expansion flow is proposed and its sensitive mechanism is revealed.The finite element method and CMOSOL are used to establish a three-di-mensional model,and the temperature field of the bidirectional thermal expansion flow gyro sensitive element is cal-culated.The calculation results show that the bidirectional thermal expansion flow gyroscope exhibits gyroscopic effect,and the temperature sensitivity of the gyroscope is 1.577 K·(rad/s)-1,the sensitivity is 0.064 V·(rad/s)-1,and the nonlinearity is 6.855%when the input power is 70 mW and the input angular velocity ranges from-25-25 rad/s.The gyro is characterized by high sensitivity,low suppression cross-coupling and simple structure,and can be used in the fields of electronic equipment,aerospace and medical instruments etc.
关键词
热膨胀流陀螺/敏感机理/有限元分析/温度场/陀螺效应Key words
thermal expansion flow gyroscope/sensitivity mechanism/finite element analysis/temperature field/gyroscopic effect引用本文复制引用
基金项目
国家自然科学基金资助项目(61771060)
北京市教育委员会科研计划基金资助项目(23JD0003)
北京市新世纪百千万人才工程培养基金资助项目(2019A20)
北京市重点实验室开放课题资助项目(2023202109)
北京信息科技大学促进高校分类发展项目(20230416)
现代测控技术教育部重点实验室资助项目(2023202101)
北京信息科技大学北京市传感器重点实验室资助项目(2023202108)
北京信息科技大学学科与研究生教育校内基金资助项目(20230403)
出版年
2024
NETL
NSTL
万方数据