Design and Research of a Beam-Composite Membrane-Island Pressure Resistance Pressure Sensor
To solve the sensitivity and nonlinearity of pressure sensor of microelectromechanical system(MEMS),Proposed a beam-composite membrane-island pressure-sensing structure,Optimize the overall structure size to obtain the maximum horizontal stress difference and deflection,Doping type,doping concentration,structure size and distribution position,And comparing the beam-composite membrane-island structure with the output of conventional structures,According to the simulation results,the sensitivity of beam-composite membrane-island structure in the range of 0-60 kPa pressure is increased by more than 7%higher than the related structure and 2 times higher than the E-type structure,The nonlinearity of 0.029%FSS,Meet the requirements of high sensitivity and high linearity of MEMS micro pressure pressure sensor,It can support the relevant applied research in the med-ical field.
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