高Q值横向激发体声波谐振器的设计与制备
Design and Preparation of High-Q XBARs
张帅 1俞振一 1郭瑜 1孙宗琴 1傅肃磊 2许志斌 2王为标2
作者信息
- 1. 江南大学 物联网工程学院,江苏 无锡 214122
- 2. 无锡市好达电子股份有限公司,江苏 无锡 214124
- 折叠
摘要
随着 5G移动通信时代的发展,射频前端(RF front-ends)的滤波和信号处理迫切需要高频大带宽的声学谐振器.横向激发体声波谐振器(XBAR)具有超高的工作频率和超大的机电耦合系数(k2),但其品质因数(Q)值不高,阻碍了其在射频前端中的应用.该文提出了一种基于ZY切铌酸锂(LiNbO3)的 XBAR谐振器,通过有限元(FEM)仿真对谐振器进行了优化设计,并在微机电系统(MEMS)工艺下对谐振器进行加工.该文所制备的横向激发体声波谐振器 A1 模式的谐振频率为 4.72 GHz,k2 =26.9%,Q3 dB 为 384,温度频率漂移系数为-60.5×10-6/℃.A3 模式的谐振频率为 13.5 GHz,k2 =4.4%.
Abstract
With the adventof the fifth generation(5 G)mobile communication era,there is an urgent demand for high-frequency and large-bandwidth acoustic resonators for RF front-end filtering and signal processing.The lateral-ly excited bulk wave resonator(XBAR)has garnered significant attention from researchers due to its ultra-high op-erating frequency and substantial electromechanical coupling coefficient(k2).However,XBARs suffer from alow quality factor(Q),impeding their application in RF front-ends.This paper proposes XBARs based on ZY-cut lithi-um niobate(LiNbO3).Resonator designs were optimized using the finite element method,and resonators were fab-ricated using micro-electro-mechanical systems.The resulting XBAR exhibiteda resonant frequency of 4.72 GHz,k2 value of 26.9%,Q3 dB value of 384,and temperature coefficient of frequency of-60.5×10-6/℃for the A1 mode,along with a resonant frequency of 13.5 GHzand k2 value of 4.4%for the A3 mode.
关键词
横向激发体声波谐振器(XBAR)/品质因数(Q)值/高频/大带宽/5G通信Key words
laterally excited bulk wave resonator(XBAR)/quality factor(Q)/high-frequency/large-bandwidth/5G引用本文复制引用
出版年
2024
NETL
NSTL
万方数据