With the adventof the fifth generation(5 G)mobile communication era,there is an urgent demand for high-frequency and large-bandwidth acoustic resonators for RF front-end filtering and signal processing.The lateral-ly excited bulk wave resonator(XBAR)has garnered significant attention from researchers due to its ultra-high op-erating frequency and substantial electromechanical coupling coefficient(k2).However,XBARs suffer from alow quality factor(Q),impeding their application in RF front-ends.This paper proposes XBARs based on ZY-cut lithi-um niobate(LiNbO3).Resonator designs were optimized using the finite element method,and resonators were fab-ricated using micro-electro-mechanical systems.The resulting XBAR exhibiteda resonant frequency of 4.72 GHz,k2 value of 26.9%,Q3 dB value of 384,and temperature coefficient of frequency of-60.5×10-6/℃for the A1 mode,along with a resonant frequency of 13.5 GHzand k2 value of 4.4%for the A3 mode.
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