Simulation Analysis of a Thin-Film Bulk Acoustic-Wave Resonator for Spurious-Mode Suppression
In this study,the effect of the electrode-boundary step structure on the spurious mode of thin-film bulk acoustic resonators(FBARs)is investigated.The finite-element simulation method is used to investigate the effect of the width dimension of the step structure on the suppression of spurious modes.The step structure is ana-lyzed in conjunction with the vibration pattern to suppress the leakage of acoustic energy and to improve the quality factor of the device.To further verify the simulation results,FBAR devices are experimentally prepared.The re-sults show that when the width of the raised frame is 3 μm and the width of the recessed frame is 1.5 μm,the re-sonator spurious mode is effectively suppressed and the quality factor at the anti-resonance frequency is increased by about 100.
thin film bulk acoustic resonators(FBAR)step structurespurious mode suppressionfinite ele-ment
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