低频小型化兰姆波谐振器的研究
Research on Low-Frequency Miniaturized Lamb Wave Resonator
叶昶裕 1肖强 2陈正林 2董加和 2米佳 2鲍景富1
作者信息
- 1. 电子科技大学 集成电路科学与工程学院,四川 成都 611731
- 2. 中国电子科技集团公司 第二十六研究所,重庆 400060
- 折叠
摘要
针对低频声学器件的小型化、大带宽问题,该文基于Y切-铌酸锂压电薄膜激发了反对称 A0 兰姆波模式,并采用有限元法对 A0 模式进行了结构设计与理论分析.研究了铌酸锂切型、电极材料、金属化比及膜层厚度变化对声速和机电耦合系数等性能的影响.结果表明,特定结构下,与常规声表面波相比,A0 模式兰姆波声速较小,机电耦合系数较大,有利于低频声学滤波器小型化设计.通过研究不同结构对谐振器 A0 模式兰姆波的横向模态的影响,实现了杂波抑制.
Abstract
In pursuit of overcoming challenges hindering the miniaturization of low-frequency acoustic devices with extensive bandwidth,this study investigated the excitation of the antisymmetric A0 Lamb wave mode utilizing a Y-cut lithium niobate piezoelectric film.The finite element method was then used to examine the structural design and conduct a theoretical analysis of the A0 mode.An assessment of various factors including lithium niobate cut-ting type,electrode material,metallization ratio,and film thickness variations on the acoustic velocity and electro-mechanical coupling coefficient revealed that the A0 mode Lamb wave exhibiteda lower acoustic velocity and larger electromechanical coupling coefficient compared to the conventional surface acoustic wave within a specific structure.This characteristic is advantageous for the miniaturization of low-frequency acoustic filters.Furthermore,we inves-tigated the impact of different structures on the transverse mode of the resonator A0 mode Lamb wave to achieve clutter suppression.
关键词
低频小型化/谐振器/兰姆波/铌酸锂/横向模态抑制Key words
low-frequency miniaturization/resonator/Lamb wave/lithium niobate/transverse mode suppres-sion引用本文复制引用
出版年
2024
NETL
NSTL
万方数据