独立敏感式MEMS热膨胀流陀螺的机理研究
Research on the Mechanism of an Independent Sensitive MEMS Thermal Expansion-Flow Gyroscope
刘珺宇 1朴林华 1佟嘉程 1马炫霖1
作者信息
- 1. 北京信息科技科技大学 北京市传感器重点实验室,北京 100101
- 折叠
摘要
提出了一种新型独立敏感式微机电系统(MEMS)热膨胀流陀螺并对其敏感机理进行了研究.通过COMSOL创建了该结构的三维模型,并使用有限元方法对其敏感结构的温度场进行了计算.结果表明,在加热器功率为 50 mW,角速度为-10～10 rad/s时,该陀螺的温度灵敏度为 0.224 K·(rad·s-1)-1,非线性度为 2.37%,具有陀螺效应,且灵敏度为 1.8 mV·(rad·s-1)-1,非线性度为 2.06%.该陀螺具有灵敏度高及工艺简单等特点,为后续结构优化提供了理论依据.
Abstract
In this paper,a new independently sensitive micro-electromechanical system(MEMS)thermal expan-sion-flow gyroscope is proposed and its sensitivity mechanism is revealed.A three-dimensional model of the struc-ture was created using the COMSOL multiphysics simulation software and finite-element calculations of the temper-ature field of its sensitive structure were performed.The computational results show that at a 50 mW heater power and an angular-velocity variation range of-10 rad/s-10 rad/s,this gyro has a gyroscopic effect with a temperature sensitivity of 0.224 K·(rad·s-1)-1 and a nonlinearity of 2.37%,and a sensitivity of 1.8 mV·(rad·s-1)-1 and a nonlinearity of 2.06%.This gyro has a high sensitivity and simple process.In addition,this study lays a theoreti-cal basis for subsequent structure optimizations.
关键词
热膨胀流陀螺/微机械/独立敏感/单轴/敏感机理/COMSOLKey words
expansion flow gyroscope/micromachinery/independently sensitive/single axis/sensitivity mecha-nism/COMSOL引用本文复制引用
基金项目
国家自然科学基金(61771060)
北京市教委科研项目(23JD0003)
北京市新世纪百千万人才工程培养资助项目(2019A20)
北京市重点实验室开放基金(2023202109)
北京信息科技大学促进高校分类发展项目(20230416)
现代测控技术教育部重点实验室项目(2023202101)
北京信息科技大学北京市传感器重点实验室项目(2023202108)
北京信息科技大学学科与研究生教育校内项目(20230403)
出版年
2024
NETL
NSTL
万方数据