Piezoelectric Micro-Motion Platform Based on Hydraulic Amplification
In response to the difficulty of traditional micro-motion platforms in meeting the requirements of mi-cro/nano positioning,a two degree-of-freedom piezoelectric micro-motion platform based on hydraulic amplification is proposed and its structural design is created.The orthogonal design method was used to analyze the bidirectional fluid-structure coupling and optimize its structural parameters.A physical prototype was developed and experimen-tal research was conducted.The open-loop experimental results show that when a 90 μm displacement is input into the piezoelectric actuator,the maximum displacement of the piezoelectric micro-motion platform is 603.0 μm,and the magnification is approximately 6.7.The closed-loop control experimental results show that using a segmented PID algorithm can reduce the overshoot,shorten the response and steady-state times,and reduce the steady-state error to±0.2 μm.Thus,the micro-motion platform can realize precise large-scale positioning.
micro-motion platformpiezoelectric actuatorhydraulic amplificationbidirectional fluid-structure couplingexperimental research
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