基于液压放大的压电微动平台设计与试验
Piezoelectric Micro-Motion Platform Based on Hydraulic Amplification
许有熊 1庄广锋 2陈星宇 2李恭乐2
作者信息
- 1. 南京工程学院 自动化学院,江苏 南京 211167
- 2. 南京工程学院 机械工程学院,江苏 南京 211167
- 折叠
摘要
针对传统微动平台难以满足微/纳米定位的要求,该文结合液压放大原理,提出一种基于液压放大的两自由度压电微动平台,并对其进行了结构设计.采用正交设计方法对其进行有限元双向流固耦合分析,优化了其结构参数.研制了实物样机并进行试验研究.开环控制试验结果表明,当压电驱动器输入为 90 μm 时,压电微动平台最大输出位移为 603.0 μm,放大倍数约为 6.7;闭环控制试验结果表明,采用分段微分、积分、比例(PID)算法能降低超调量,且响应时间、稳态时间均减小,稳态误差降低(为±0.2 μm),实现了微动平台的大范围输出精密定位.
Abstract
In response to the difficulty of traditional micro-motion platforms in meeting the requirements of mi-cro/nano positioning,a two degree-of-freedom piezoelectric micro-motion platform based on hydraulic amplification is proposed and its structural design is created.The orthogonal design method was used to analyze the bidirectional fluid-structure coupling and optimize its structural parameters.A physical prototype was developed and experimen-tal research was conducted.The open-loop experimental results show that when a 90 μm displacement is input into the piezoelectric actuator,the maximum displacement of the piezoelectric micro-motion platform is 603.0 μm,and the magnification is approximately 6.7.The closed-loop control experimental results show that using a segmented PID algorithm can reduce the overshoot,shorten the response and steady-state times,and reduce the steady-state error to±0.2 μm.Thus,the micro-motion platform can realize precise large-scale positioning.
关键词
微动平台/压电驱动器/液压放大/双向流固耦合/试验研究Key words
micro-motion platform/piezoelectric actuator/hydraulic amplification/bidirectional fluid-structure coupling/experimental research引用本文复制引用
基金项目
国家自然科学基金(52375292)
江苏省研究生科研与实践创新计划(SJCX23_1190)
出版年
2024
NETL
NSTL
万方数据