声表面波滤波器温度敏感性仿真研究
Research on Temperature Sensitivity of Surface Acoustic Wave Filter
王吉芳 1郑露 2陈平静 1潘虹芝 1杜雪松 1董加和 1陆川 1陈正林 3吴浩东 4马晋毅3
作者信息
- 1. 中国电子科技集团公司第二十六研究所,重庆 400060
- 2. 重庆医药高等专科学校,重庆 401131
- 3. 中国电子科技集团公司第二十六研究所,重庆 400060;模拟集成电路国家重点实验室,重庆 400060
- 4. 南京大学 声学科学与工程系教育部近代声学重点实验室,江苏 南京 210093
- 折叠
摘要
针对不同温度场情况下任意复杂膜系结构和电路拓扑结构的声表面波(SAW)滤波器的温度敏感性精确计算问题,首先将温度场以热应力、热应变的方式耦合声/电本征方程并考虑封装模型的电磁因素,再结合分层级联算法和全波仿真技术,计算任意复杂膜系结构和电路拓扑结构的SAW滤波器的温度敏感性,实现不同温度作用下SAW滤波器频率响应曲线、频率温度系数(TCF)值、损耗、带宽及带外抑制等性能的综合分析.通过41°Y-X LiNbO3/SiO2/Si_poly/Si(111)复合衬底SAW滤波器的优化设计与研制,其设计优化结果与实验结果吻合较好,验证了该方法的有效性和可行性.
Abstract
This study investigates the accurate temperature sensitivity calculation of surface acoustic wave(SAW)filters with arbitrary complex membrane structures and circuit topologies at different temperatures.The temperature field is coupled with the acoustic/electrical equation in the form of thermal stress and strain,consider-ing the electromagnetic factor of the package model.Combining the hierarchical cascade algorithm and full-wave sim-ulation technology,the temperature sensitivity of SAW filters in this specific contextis calculated.In addition,the frequency response characteristic,TCF value,insertion loss,bandwidth and rejection of the SAW filter under dif-ferent temperatures are comprehensively analyzed.Based on the design of a SAW filter with 41°Y-X LiNbO3/SiO2/Si_poly/Si(111),the results are in good agreement with the experimental results,and the effectiveness and feasibil-ity of the proposed method are verified.
关键词
温度敏感性/声表面波(SAW)滤波器/分层级联/全波仿真Key words
temperature sensitivity/SAW filters/hierarchical cascade/full-wave simulation引用本文复制引用
基金项目
重庆市教委科学技术研究计划(KJQN202302803)
出版年
2024
NETL
NSTL
万方数据