Research on Temperature Sensitivity of Surface Acoustic Wave Filter
This study investigates the accurate temperature sensitivity calculation of surface acoustic wave(SAW)filters with arbitrary complex membrane structures and circuit topologies at different temperatures.The temperature field is coupled with the acoustic/electrical equation in the form of thermal stress and strain,consider-ing the electromagnetic factor of the package model.Combining the hierarchical cascade algorithm and full-wave sim-ulation technology,the temperature sensitivity of SAW filters in this specific contextis calculated.In addition,the frequency response characteristic,TCF value,insertion loss,bandwidth and rejection of the SAW filter under dif-ferent temperatures are comprehensively analyzed.Based on the design of a SAW filter with 41°Y-X LiNbO3/SiO2/Si_poly/Si(111),the results are in good agreement with the experimental results,and the effectiveness and feasibil-ity of the proposed method are verified.
temperature sensitivitySAW filtershierarchical cascadefull-wave simulation
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